JPH0312137U - - Google Patents
Info
- Publication number
- JPH0312137U JPH0312137U JP7276989U JP7276989U JPH0312137U JP H0312137 U JPH0312137 U JP H0312137U JP 7276989 U JP7276989 U JP 7276989U JP 7276989 U JP7276989 U JP 7276989U JP H0312137 U JPH0312137 U JP H0312137U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- axis direction
- moving
- substrate
- end side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7276989U JPH0312137U (en]) | 1989-06-21 | 1989-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7276989U JPH0312137U (en]) | 1989-06-21 | 1989-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312137U true JPH0312137U (en]) | 1991-02-07 |
Family
ID=31611002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7276989U Pending JPH0312137U (en]) | 1989-06-21 | 1989-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312137U (en]) |
-
1989
- 1989-06-21 JP JP7276989U patent/JPH0312137U/ja active Pending
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